Solid-State Sensors - Ambarish Paul

. .

Résumé :
..

Biographie:
.

Sommaire:

About the Authors xv

Preface xvii

1 Introduction 1

1.1 Overview 1

1.1.1 Growth in Solid-State Sensor Market 2

1.1.2 Solid-State Sensors: A Recipe for Smart Sensing Systems 5

1.2 Evolution of Solid-State Sensors 6

1.2.1 Origin and Early Developments in Detection Devices 6

1.2.2 Solid-State Electronics: Post Transistor Era 9

1.2.3 Emergence of New Technologies 12

1.2.3.1 Thin-Film Technology 14

1.2.3.2 Advancements in Micro- and Nanofabrication 14

1.2.3.3 Emergence of Nanotechnology 16

1.2.3.4 Printed Electronics on Flexible Substrates 17

1.2.3.5 Smart Devices with Artificial Intelligence 20

1.2.3.6 IoT-Enabled Sensors 21

1.2.4 Paradigm Shift in Solid-State Sensor Research 22

1.2.4.1 Organic Devices 23

1.2.4.2 Wearable Devices 24

1.2.4.3 Implantable Sensors 25

1.3 Outline 27

References 28

2 Classification and Terminology 35

2.1 Sensor Components 35

2.2 Classification of Solid-State Sensors 36

2.3 Sensor Terminology 40

2.3.1 Accuracy 40

2.3.2 Precision 41

2.3.3 Calibration Curve 41

2.3.4 Sensitivity 41

2.3.5 Threshold/Minimum Detectable Limit 42

2.3.6 Null Offset 42

2.3.7 Dynamic Range 42

2.3.8 Nonlinearity 42

2.3.9 Hysteresis 43

2.3.10 Selectivity 43

2.3.11 Repeatability 43

2.3.12 Reproducibility 43

2.3.13 Resolution 43

2.3.14 Stability 43

2.3.15 Noise 44

2.3.16 Response and Recovery Time 44

2.3.17 Drift 45

2.4 Conclusion 45

References 45

3 Fabrication Technologies 47

3.1 Introduction 47

3.2 Deposition 48

3.2.1 Physical Vapor Deposition 49

3.2.1.1 Thermal Evaporation 50

3.2.1.2 Sputter Deposition 52

3.2.1.3 Electron-Beam PVD 55

3.2.1.4 Laser Ablation 58

3.2.2 Electroplating 59

3.2.3 Thermal Oxidation 61

3.2.4 Chemical Vapor Deposition 62

3.2.4.1 Atmospheric Pressure Chemical Vapor Deposition 62

3.2.4.2 Low-Pressure Chemical Vapor Deposition 63

3.2.4.3 Plasma-Enhanced Chemical Vapor Deposition 63

3.3 Exposure-Based Lithography Techniques 64

3.3.1 UV Lithography 65

3.3.1.1 Exposure Tool 65

3.3.1.2 Mask 66

3.3.1.3 Photoresist 67

3.3.2 Electron-Beam Lithography 68

3.3.3 X-Ray Lithography 71

3.3.4 Ion-Beam Lithography 71

3.4 Soft Lithography Techniques 72

3.4.1 Particle Replication in Nonwetting Templates 74

3.4.2 Microcontact Printing 75

3.4.3 Microfluidic Patterning 77

3.4.4 Laminar Flow Patterning 79

3.4.5 Step and Flash Imprint Lithography 80

3.4.6 Hydrogel Template 82

3.5 Etching 83

3.5.1 Wet Etching 85

3.5.2 Dry Etching 89

3.6 Doping 90

3.6.1 Diffusion 92

3.6.2 Ion Implantation 94

3.7 Solution Processed Methods 95

3.7.1 Inkjet Printing 95

3.7.2 Drop Dispensing 98

3.7.3 Spray Deposition 100

3.7.4 Screen Printing 101

3.7.5 Tape Casting 103

3.8 Conclusions 105

References 106

4 Piezoelectric Sensors 113

4.1 Overview 113

4.2 Theory of Piezoelectricity 115

4.2.1 Direct Piezoelectric Effect 115

4.2.2 Poling 116

4.2.3 Static Piezoelectricity 118

4.2.4 Anisotropic Crystals 118

4.3 Basic Mathematical Formulation 119

4.3.1 Contribution of Piezoelectric Effect to Elastic constant C 120

4.3.2 Contribution of Piezoelectric Effect to Dielectric Constant ? 121

4.4 Constitutive Equations 122

4.4.1 Piezoelectric 122

4....