Microtransducer CAD - Baltes, Henry

. .

Résumé :
Computer-aided-design (CAD) of semiconductor microtransducers is relatively new in contrast to their counterparts in the integrated circuit world. Integrated silicon microtransducers are realized using microfabrication techniques similar to those for standard integrated circuits (ICs). Unlike IC devices, however, microtransducers must interact with their environment, so their numerical simulation is considerably more complex. While the design of ICs aims at suppressing parasitic? effects, microtransducers thrive on optimizing the one or the other such effect. The challenging quest for physical models and simulation tools enabling microtransducer CAD is the topic of this book. The book is intended as a text for graduate students in Electrical Engineering and Physics and as a reference for CAD engineers in the microsystems industry.

Biographie:
Flora Li received her Bachelor of Applied Science degree in Electrical Engineering from University of Waterloo, Canada, in 2002. She completed her MASc degree in Electrical Engineering at University of Waterloo in 2003, where her research focus was on the investigation of deep-UV sensitive CCD image sensors and the related radiation damage issues. She is currently pursuing her Ph.D. degree in the field of organic electronics and polymer TFTs, under the supervision of Prof. Arokia Nathan at the University of Waterloo. Arokia Nathan received his PhD in Electrical Engineering from the University of Alberta, Edmonton, Alberta, Canada, in 1988, where he was engaged in research related to the physics and numerical modeling of semiconductor microsensors. In 1987, he joined LSI Logic Corp., Santa Clara, CA where he worked on advanced multichip packaging techniques and related issues. Subsequently, he was at the Institute of Quantum Electronics, ETH Z?rich, Switzerland. In 1989, he joined the Department of Electrical and Computer Engineering, University of Waterloo, where he is currently a Professor. In 1995, he was a Visiting Professor at the Physical Electronics Laboratory, ETH Z?rich. His present research interests lie in fabrication of devices, circuits, and systems using disordered semiconductor, including organic, materials on rigid and mechanically flexible substrates for large area electronics. He held the DALSA/NSERC industrial research chair in sensor technology, and is a recipient of the Natural Sciences and Engineering Research Council E.W.R. Steacie Fellowship. He has published extensively in the field of sensor technology and CAD, and thin film transistor electronics, and is a co-author of the book, Microtransducer CAD, published by Springer in 1999....

Sommaire:
1. Introduction.- 1.1 Modeling and Simulation of Microtransducers.- 1.2 Illustrative Example.- 1.3 Progress in Microtransducer Modeling.- 1.4 References.- 2 Basic Electronic Transport.- 2.1 Poisson's Equation.- 2.2 Continuity Equations.- 2.3 Carrier Transport in Crystalline Materials and Isothermal Behavior.- 2.4 Electrical Conductivity and Isothermal Behavior in Polycrystalline Materials.- 2.5 Electrical Conductivity and Isothermal Behavior in Metals.- 2.6 Boundary and Interface Conditions.- 2.7 The External Fields - What Do They Influence?.- 2.8 References.- 3 Radiation Effects on Carrier Transport.- 3.1 Reflection and Transmission of Optical Signals.- 3.2 Modeling Optical Absorption in Intrinsic Semiconductors.- 3.3 Absorption in Heavily-Doped Semiconductors.- 3.4 Optical Generation Rate and Quantum Efficiency.- 3.5 Low Energy Interactions with Insulators and Metals.- 3.6 High Energy Interactions and Monte Carlo Simulations.- 3.7 Model Equations for Radiant Sensor Simulation.- 3.8 Illustrative Simulation Example - Color Sensor.- 3.9 References.- 4 Magnetic Field Effects on Carrier Transport.- 4.1 Galvanomagnetic Transport Equation.- 4.2 Galvanomagnetic Transport Coefficients.- 4.3 Equations and Boundary Conditions for Magnetic Sensor Simulation.- 4.4 Illustrative Simulation Example - Micromachined Magnetic Vector Probe.- 4.5 References.- 5 Thermal Non-Uniformity Effects on Carrier Transport.- 5.1 Non-Isothermal Effects.- 5.2 Electrothermal Transport Model.- 5.3 Electrical and Thermal Transport Coefficients.- 5.4 Electro-Thermo-Magnetic Interactions.- 5.5 Heat Transfer in Thermal Microstructures.- 5.6 Summary of Equations and Computational Procedure.- 5.7 Illustrative Simulation Example - Micro Pirani Gauge.- 5.8 References.- 6 Mechanical Effects on CarrierTransport.- 6.1 Piezoresistive Effect.- 6.2 Strain and Electron Transport.- 6.3 Strain and Hole Transport.- 6.4 Piezojunction Effect.- 6.5 Effects of Stress Gradients.- 6.6 Galvano-Piezo-Magnetic Effects.- 6.7 The Piezo Drift-Diffusion Transport Model.- 6.8 Illustrative Simulation Example - Stress Effects on Hall Sensors.- 6.9 References.- 7 Mechanical and Fluidic Signals.- 7.1 Definitions.- 7.2 Model Equations for Mechanical Analysis.- 7.3 Model Equations for Analysis of Fluid Transport.- 7.4 Illustrative Simulation Example - Analysis of Flow Channels.- 7.5 References.- 8 Micro-Actuation.- 8.1 Transduction Principles.- 8.2 State-of-the-Art and Preview.- 8.3 Electrostatic Actuation.- 8.4 Thermal Actuation.- 8.5 Magnetic Actuation.- 8.6 Piezoelectric Actuation.- 8.7 Electroacoustic Transducers.- 8.8 Computational Procedure and Coupling.- 8.9 Illustrative Example - CMOS Micromirror.- 8.10 References.- 9 Microsystem Simulation.- 9.1 Electrical Analogues for Mixed-Signals and Historical Developments.- 9.2 Circuit Modeling and Implementation Considerations.- 9.3 Lumped Analysis: Illustrative Example - Electrostatic Micromirror.- 9.4 Distributed Analysis: Illustrative Example - Flow Microsensor.- 9.5 References.